Search results for: the-physics-of-micro-nano-fabrication

The Physics of Micro Nano Fabrication

Author : Ivor Brodie
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In this revised and expanded edition, the authors provide a comprehensive overview of the tools, technologies, and physical models needed to understand, build, and analyze microdevices. Students, specialists within the field, and researchers in related fields will appreciate their unified presentation and extensive references.

The Physics Of Micro Nano Fabrication

Author : Brodie
File Size : 29.40 MB
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The Physics of Micro Nano Fabrication

Author : Ivor Brodie
File Size : 75.43 MB
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Nanofabrication Handbook

Author : Stefano Cabrini
File Size : 38.52 MB
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While many books are dedicated to individual aspects of nanofabrication, there is no single source that defines and explains the total vision of the field. Filling this gap, Nanofabrication Handbook presents a unique collection of new and the most important established approaches to nanofabrication. Contributors from leading research facilities and academic institutions around the world define subfields, offer practical instructions and examples, and pave the way for future research. Helping readers to select the proper fabricating technique for their experiments, the book provides a broad vision of the most critical problems and explains how to solve them. It includes basic definitions and introduces the main underlying concepts of nanofabrication. The book also discusses the major advantages and disadvantages of each approach and offers a wide variety of examples of cutting-edge applications. Each chapter focuses on a particular method or aspect of study. For every method, the contributors describe the underlying theoretical basis, resolution, patterns and substrates used, and applications. They show how applications at the nanoscale require a different process and understanding than those at the microscale. For each experiment, they elucidate key solutions to problems relating to materials, methods, and surface considerations. A complete resource for this rapidly emerging interdisciplinary field, this handbook provides practical information for planning the experiments of any project that employs nanofabrication techniques. It gives readers a foundation to enter the complex world of nanofabrication and inspires the scientific community at large to push the limits of nanometer resolution.

Micro Nanorobotic Manipulation Systems and Their Applications

Author : Toshio Fukuda
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Micro/Nano Robotics and Automation technologies have rapidly grown associated with the growth of Micro and Nanotechnologies. This book presents a summary of fundamentals in micro-nano scale engineering and the current state of the art of these technologies. “Micro-Nanorobotic Manipulation Systems and their Applications” introduces these advanced technologies from the basics and applications aspects of Micro/Nano-Robotics and Automation from the prospective micro/nano-scale manipulation. The book is organized in 9 chapters including an overview chapter of Micro/Nanorobotics and Automation technology from the historical view and important related research works. Further chapters are devoted to the physics of micro-nano fields as well as to material and science, microscopes, fabrication technology, importance of biological cell, and control techniques. Furthermore important examples, applications and a concise summary of Micro-Nanorobotics and Automation technologies are given.

Micro and Nano Fabrication Technology

Author : Jiwang Yan
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This volume focuses on the state-of-the-art micro/nanofabrication technologies for creating miniature structures with high precision. These multidisciplinary technologies include mechanical, electrical, optical, physical, and chemical methods, as well as hybrid processes, covering subtractive and additive material manufacturing, as well as net-shape manufacturing. The materials the volume deals with include metals, alloys, semiconductors, polymers, crystals, glass, ceramics, composites, and nanomaterials. The volume is composed of 30 chapters, which are grouped into five parts. Engaging with the latest research in the field, these chapters provide important perspectives on key topics, from process developments at the shop level to scientific investigations at the academic level, offering both experimental work and theoretical analysis. Moreover, the content of this volume is highly interdisciplinary in nature, with insights from not only manufacturing technology but also mechanical/material science, optics, physics, chemistry, and more.

Nanofabrication Using Focused Ion and Electron Beams

Author : Ivo Utke
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This book comprehensively reviews the achievements and potentials of a minimally invasive, three-dimensional, and maskless surface structuring technique operating at nanometer scale by using the interaction of focused ion and electron beams (FIB/FEB) with surfaces and injected molecules.

Novel Optical Technologies for Nanofabrication

Author : Qian Liu
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Novel Optical Technologies for Nanofabrication describes recent advances made in micro/nanofabrication with super-resolution laser technologies, which are based on the latest research findings in the authors’ groups. It focuses on new techniques and methods as well as applications and development trends in laser nanofabrication, including super-resolution laser direct writing, surface structures composed of laser path-guided wrinkle, three-dimensional laser nanofabrication based on two-photon absorption, and nanofabrication by laser interference and surface plasmon polaritons. This book serves as a reference for academic researchers, engineers, technical professionals and graduate students in the fields of micro/nanotechnology, thin film materials, super-resolution optics and laser techniques. Qian Liu is a Professor at Laboratory for Nanodevice, National Center for Nanoscience and Technology, China. Xuanming Duan is a Professor at the Key Laboratory of Functional Crystals and Laser Technology, Technical Institute of Physics and Chemistry, Chinese Academy of Sciences, China Changsi Peng is a Professor at the Institute of Information Optical Engineering, Soochow University, China.

Toward Quantum FinFET

Author : Weihua Han
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This book reviews a range of quantum phenomena in novel nanoscale transistors called FinFETs, including quantized conductance of 1D transport, single electron effect, tunneling transport, etc. The goal is to create a fundamental bridge between quantum FinFET and nanotechnology to stimulate readers' interest in developing new types of semiconductor technology. Although the rapid development of micro-nano fabrication is driving the MOSFET downscaling trend that is evolving from planar channel to nonplanar FinFET, silicon-based CMOS technology is expected to face fundamental limits in the near future. Therefore, new types of nanoscale devices are being investigated aggressively to take advantage of the quantum effect in carrier transport. The quantum confinement effect of FinFET at room temperatures was reported following the breakthrough to sub-10nm scale technology in silicon nanowires. With chapters written by leading scientists throughout the world, Toward Quantum FinFET provides a comprehensive introduction to the field as well as a platform for knowledge sharing and dissemination of the latest advances. As a roadmap to guide further research in an area of increasing importance for the future development of materials science, nanofabrication technology, and nano-electronic devices, the book can be recommended for Physics, Electrical Engineering, and Materials Science departments, and as a reference on micro-nano electronic science and device design. Offers comprehensive coverage of novel nanoscale transistors with quantum confinement effect Provides the keys to understanding the emerging area of the quantum FinFET Written by leading experts in each research area Describes a key enabling technology for research and development of nanofabrication and nanoelectronic devices

Nanostructures and Nanotechnology

Author : Douglas Natelson
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Focusing on the fundamental principles of nanoscience and nanotechnology, this carefully developed textbook will equip students with a deep understanding of the nanoscale. • Each new topic is introduced with a concise summary of the relevant physical principles, emphasising universal commonalities between seemingly disparate areas, and encouraging students to develop an intuitive understanding of this diverse area of study • Accessible introductions to condensed matter physics and materials systems provide students from a broad range of scientific disciplines with all the necessary background • Theoretical concepts are linked to real-world applications, allowing students to connect theory and practice • Chapters are packed with problems to help students develop and retain their understanding, as well as engaging colour illustrations, and are accompanied by suggestions for additional reading. Containing enough material for a one- or two-semester course, this is an excellent resource for senior undergraduate and graduate students with backgrounds in physics, chemistry, materials science and electrical engineering.

BioNanoFluidic MEMS

Author : Peter J. Hesketh
File Size : 27.41 MB
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This book explains biosensor development fundamentals. It also initiates awareness in engineers and scientists who would like to develop and implement novel biosensors for agriculture, biomedicine, homeland security, environmental needs, and disease identification. In addition, the book introduces and lays the basic foundation for design, fabrication, testing, and implementation of next generation biosensors through hands-on learning.

Materials Processing Handbook

Author : Joanna R. Groza
File Size : 22.24 MB
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The field of materials science and engineering is rapidly evolving into a science of its own. While traditional literature in this area often concentrates primarily on property and structure, the Materials Processing Handbook provides a much needed examination from the materials processing perspective. This unique focus reflects the changing comple


Author : Maria Stepanova
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Intended to update scientists and engineers on the current state of the art in a variety of key techniques used extensively in the fabrication of structures at the nanoscale. The present work covers the essential technologies for creating sub 25 nm features lithographically, depositing layers with nanometer control, and etching patterns and structures at the nanoscale. A distinguishing feature of this book is a focus not on extension of microelectronics fabrication, but rather on techniques applicable for building NEMS, biosensors, nanomaterials, photonic crystals, and other novel devices and structures that will revolutionize society in the coming years.

Micro and Nano Fabrication

Author : Hans H. Gatzen
File Size : 20.69 MB
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For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.


Author : Zheng Cui
File Size : 23.76 MB
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This second edition of Nanofabrication is one of the most comprehensive introductions on nanofabrication technologies and processes. A practical guide and reference, this book introduces readers to all of the developed technologies that are capable of making structures below 100nm. The principle of each technology is introduced and illustrated with minimum mathematics involved. Also analyzed are the capabilities of each technology in making sub-100nm structures, and the limits of preventing a technology from going further down the dimensional scale. This book provides readers with a toolkit that will help with any of their nanofabrication challenges.

Fabrication Design of Resonant Microdevices

Author : Behraad Bahreyni
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This book discusses the main issues of fabrication and design, and applications of micromachined resonant devices, including techniques commonly used for processing the output signal of resonant micro-electro-mechanical systems (MEMS). Concepts of resonance are introduced, with an overview of fabrication techniques for micromachined devices – important to understand as design options will depend on how the device will be fabricated. Also explained: excitation and signal detection methods; an analytic model of device behavior (a valuable design tool); numerical simulation techniques; issues of damping and noise for resonant MEMS; electronic interfacing; packaging issues; and numerous examples of resonant MEMS from academia and industry. Offers numerous academic and industrial examples of resonant MEMS Provides an analytic model of device behaviour Explains two-port systems in detail Devotes ample space to excitation and signal detection methods Covers issues of damping and noise for resonant MEMS, two topics of particular importance for high-Q devices

Frontiers in Nanoscale Science of Micron Submicron Devices

Author : A.-P. Jauho
File Size : 75.84 MB
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Nanoscale Science, whose birth and further growth and development has been driven by the needs of the microelectronics industry on one hand, and by the sheer human curiosity on the other hand, has given researchers an unprecedented capability to design and construct devices whose function ality is based on quantum and mesoscopic effects. A necessary step in this process has been the development of reliable fabrication techniques in the nanometer scale: two-dimensional systems, quantum wires and dots, and Coulomb blockade structures with almost ideal properties can nowadays be fabricated, and subjected to experimental studies. How does one fabricate micro/nanostructures of low dimensionality? How does one perform a nanoscale characterization of these structures? What are the fundamental properties typical to the structures? Which new physical processes in nanostructures need to be understood? What new physical processes may allow us to create new nanostructures? An improved understanding of these topics is necessary for creation of new concepts for future electronic and optoelectronic devices and for characterizing device structures based on those concepts.

Modern Machining Technology

Author : Bijoy Bhattacharyya
File Size : 75.39 MB
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Modern Machining Technology: Advanced, Hybrid, Micro Machining and Super Finishing Technology explores complex and precise components with challenging shapes that are increasing in demand in industry. As the first book to cover all major technologies in this field, readers will find the latest technical developments and research in one place, allowing for easy comparison of specifications. Technologies covered include mechanical, thermal, chemical, micro and hybrid machining processes, as well as the latest advanced finishing technologies. Each topic is accompanied by a basic overview, examples of typical applications and studies of performance criteria. In addition, readers will find comparative advantages, model questions and solutions. Addresses a broad range of modern machining techniques, providing specifications for easy comparison Includes descriptions of the main applications for each method, along with the materials or products needed Provides the very latest research in processes, including hybrid machining

Physics and Properties of Narrow Gap Semiconductors

Author : Junhao Chu
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Narrow gap semiconductors are the most important materials for the preparation of advanced modern infrared systems. They often operate at the extremes of the rules of semiconductor science. This book offers clear descriptions of crystal growth and the fundamental structure and properties of these unique materials. Topics covered include band structure, optical and transport properties, and lattice vibrations and spectra. A thorough treatment of the properties of low-dimensional systems and their relation to infrared applications is provided.

Semiconductor Device Physics and Simulation

Author : J.S. Yuan
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The advent of the microelectronics technology has made ever-increasing numbers of small devices on a same chip. The rapid emergence of ultra-large-scaled-integrated (ULSI) technology has moved device dimension into the sub-quarter-micron regime and put more than 10 million transistors on a single chip. While traditional closed-form analytical models furnish useful intuition into how semiconductor devices behave, they no longer provide consistently accurate results for all modes of operation of these very small devices. The reason is that, in such devices, various physical mechanisms affect the device performance in a complex manner, and the conventional assumptions (i. e. , one-dimensional treatment, low-level injection, quasi-static approximation, etc. ) em ployed in developing analytical models become questionable. Thus, the use of numerical device simulation becomes important in device modeling. Researchers and engineers will rely even more on device simulation for device design and analysis in the future. This book provides comprehensive coverage of device simulation and analysis for various modem semiconductor devices. It will serve as a reference for researchers, engineers, and students who require in-depth, up-to-date information and understanding of semiconductor device physics and characteristics. The materials of the book are limited to conventional and mainstream semiconductor devices; photonic devices such as light emitting and laser diodes are not included, nor does the book cover device modeling, device fabrication, and circuit applications.